
OPERATION
Annex LSM 510
4-180 B 40-051 e 07/98
XY Step Size
The required step size for the scanning stage can be set in three ways:
1.) by shifting the slider
2.) by clicking on the arrow keys;
clicking on the right arrow key increases the step width,
clicking on the left arrow key decreases the step width.
One click increases/decreases the step width by 1 m.
Pressing the
CTRL
key changes the step width by 0.1 m.
Pressing the
SHIFT
key changes the step width by 10 m.
3.) by overwriting the displayed value
Values between 1 m and 1000 m can be entered for <XY Step Size>.
Z Step Size
The size of the focus step is set in the same way as the stage steps.
0.1 m is the smallest value which can be set and 100 m the highest.
Clicking on the arrow keys changes the step size by 1 m.
Pressing the CTRL key and clicking changes the step size by 0.05 m.
Pressing the Shift key and clicking changes the step size by 10 m.
Stage - Focus Position
<X> Moves and <Y> Moves
Clicking on the <and> arrow keys triggers individual X or Y moves of the size set before in the
parameter window.
Pressing on O moves the stage to the zero position and resets the display to 0.
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